Modeling and applications of silent discharge plasmas
- Asea Brown Boveri, Corporate Research Center, 5405 Baden (CH)
In this paper the nature of the silent discharge (dielectric barrier discharge) is reviewed. Theoretical models for describing its discharge physics and ensuing plasma chemistry are presented. The phenomena leading to gas breakdown in such electrode configurations at about atmospheric pressure are discussed. The current transport takes place within a large number of short-lived microdischarges, the plasma conditions of which are investigated. The theoretical predictions are compared to measurements. Two entirely different applications of silent discharges are treated: Industrial ozone production and the formation of excimers to generate ultraviolet radiation. The special capability of the silent discharge for large-scale industrial processing is demonstrated.
- OSTI ID:
- 5616022
- Journal Information:
- IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Vol. 19:2; ISSN 0093-3813
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ELECTRIC DISCHARGES
PLASMA SIMULATION
BREAKDOWN
CHEMISTRY
CORRELATIONS
DIELECTRIC PROPERTIES
ELECTRIC CONDUCTIVITY
ELECTRODES
EXCIMER LASERS
GASES
INDUSTRY
MEDIUM PRESSURE
OZONE
PLASMA
PRODUCTION
REVIEWS
USES
DOCUMENT TYPES
ELECTRICAL PROPERTIES
FLUIDS
GAS LASERS
LASERS
PHYSICAL PROPERTIES
SIMULATION
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
426002 - Engineering- Lasers & Masers- (1990-)