Shop-floor scheduling of semiconductor-wafer manufacturing

Thesis/Dissertation · Thu Jan 01 04:00:00 EST 1987

OSTI ID:5612043

Resende, M G.D.C.

Semiconductor wafer fabrication is perhaps the most complex manufacturing process found today, with a wide range of complex issues related to production planning and scheduling. Computer-integrated manufacturing (CIM) systems make is possible, in theory, to use global factory state information for factory control decisions. The possibility of making decisions on an expanded information set raises two of the research questions treated in this dissertation: How should global information be summarized and used for decisions and how much improvement can one expect as a result, compared with decisions based on local information This research investigates lot release control and dispatching policies for shop-level scheduling of a semiconductor fab. The author introduces a closed-loop scheduling policy, called Starvation Avoidance, that makes use of global factory state information and that in simulation experiments compares favorably to traditional scheduling policies (that use local and global information) with respect to the tradeoff between throughput and queueing time. The virtual inventory of the bottleneck resource is defined to be the work content at the bottleneck of all jobs either at the bottleneck station or expected to arrive at the bottleneck within a given lead time.

• Research Organization: California Univ., Berkeley, CA (USA)
• OSTI ID: 5612043
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
99 GENERAL AND MISCELLANEOUS
990220 -- Computers
Computerized Models
& Computer Programs-- (1987-1989)
COMPUTER-AIDED MANUFACTURING
COMPUTERIZED SIMULATION
CONTROL
DATA-FLOW PROCESSING
DECISION MAKING
FABRICATION
MANUFACTURING
PROGRAMMING
SEMICONDUCTOR DEVICES
SIMULATION