Structural features at the Si-SiO/sub 2/ interface

Conference · Wed Jul 09 04:00:00 EDT 1986

OSTI ID:5573186

Brower, K L

Electron paramagnetic resonance studies of defects at the Si-SiO/sub 2/ interface are presented which deal with the hyperfine interactions, strain effects, and spin-spin interactions. Our hyperfine studies include studies of the /sup 17/O and /sup 29/Si hyperfine interactions associated with dangling bonds localized on Si atoms at the (001) and (111) Si-SiO/sub 2/ interfaces. These studies indicate that oxygen is not an immediate part of the defect structure. Strain is manifested in the EPR spectra by Zeeman and hyperfine broadening effects from which we deduce that the rms deviation in the vertical position of the defect Si atoms is approximately 0.02 A. A computational model for calculating the dipolar contribution to the linewidth due to unpaired spins at the interface is presented. The contribution to the total linewidth of the P/sub b/ Zeeman resonance, which is 2.1 G (fwhm), is calculated to be 0.35 G for the case in which the applied magnetic field is perpendicular to the (111) Si-SiO/sub 2/ interface.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 5573186
• Report Number(s): SAND-86-0787C; CONF-860748-1; ON: DE86012947
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
CHALCOGENIDES
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
ELECTRON SPIN RESONANCE
ELEMENTS
EVEN-ODD NUCLEI
HYPERFINE STRUCTURE
INTERFACES
ISOTOPES
LIGHT NUCLEI
MAGNETIC RESONANCE
MINERALS
NUCLEI
OXIDE MINERALS
OXIDES
OXYGEN 17
OXYGEN COMPOUNDS
OXYGEN ISOTOPES
RESONANCE
SEMIMETALS
SILICA
SILICON
SILICON 29
SILICON COMPOUNDS
SILICON ISOTOPES
SILICON OXIDES
STABLE ISOTOPES
ZEEMAN EFFECT