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Investigation of the structure and properties of sulfur-doped expitaxial gallium arsenide layers

Journal Article · · Sov. Phys. J. (Engl. Transl.); (United States)
OSTI ID:5570878
This paper discusses the structural perfection, the lattice constant, and the electrophysical properties of sulfur doped epitaxial gallium arsenide layers, then studies them by means of a complex methods, varying the concentration of sulfur in the gaseous phase. The experimental data indicate that the sulfur atoms can exist in the GaAs lattice simultaneously in the number of states, namely in the form of substitutional and interstitial solid solutions, as well as in the form of presegregations or second phase segregations. At the maximum sulfur doping level second phase segregations are formed in the layers, which leads to an anamolous decrease in the lattice constant and the electron mobility.
Research Organization:
V.D. Kuznetsou Siberian Physicotechnical Institute, Tomsk State Univ
OSTI ID:
5570878
Journal Information:
Sov. Phys. J. (Engl. Transl.); (United States), Journal Name: Sov. Phys. J. (Engl. Transl.); (United States) Vol. 28:1; ISSN SOPJA
Country of Publication:
United States
Language:
English