Sensors for detecting molecular hydrogen based on Pd metal alloys
- Sandia National Labs., Albuquerque, NM (United States). Microsensor Research and Development Dept.
A simple process using a shadow mask is described to fabricate Nd/Ni resistors for detecting H{sub 2}. The performance of the resistive sensors is studied in relation to annealing the devices at different temperatures in 2% H{sub 2} in N{sub 2} for 2 h. The Pd/Ni film surface morphology is also examined in relation to the resistor response when exposed to H{sub 2}. The detailed information learned about the performance of the prototype resistors is used to fabricate wide-range-hydrogen microsensors, which combine a Pd/Ni chemiresistor and metal-oxide semiconductor capacitor along with a thin film metal heater and temperature sensor. These studies provide an important step for improving the reliability of microsensors used to detect H{sub 2} over concentrations ranging from 1 mTorr to 700 Torr.
- Research Organization:
- Sandia National Laboratory
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 556854
- Journal Information:
- Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 9 Vol. 144; ISSN 0013-4651; ISSN JESOAN
- Country of Publication:
- United States
- Language:
- English
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