Wide range H{sub 2} sensor using catalytic alloys
Conference
·
OSTI ID:10133419
A new Wide Range Hydrogen Sensor fabricated on a silicon chip is described. A single die measuring 4 mm by 4 mm has four different kinds of hydrogen sensors, a heater and a temperature-measuring thin metalfilm. Chemiresistors made from thin films of a Pd/Ni alloy give an accurate measure of hydrogen concentrations from 0.1 to 100%, while Metal-Insulator-Silicon (MIS) capacitors are used for hydrogen concentrations down to about 1 ppM. A microprocessor controlled circuit is described that combines temperature control and signal processing.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 10133419
- Report Number(s):
- SAND--92-2382C; CONF-9305124--1; ON: DE93007591
- Country of Publication:
- United States
- Language:
- English
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