A novel deposition technique for switchable vanadium sesquioxide (V sub 2 O sub 3 ) thin films
- LTV Missiles and Electronics Group, Research Department, MS WT-50, Dallas, Texas 75265-0003 (USA)
V{sub 2}O{sub 3} is a phase transition material, which, like other oxides of vanadium, undergoes large changes in optical and electrical properties upon switching from the semiconductor to metal state. The transition in V{sub 2}O{sub 3} occurs at temperatures well below that of oxides in the same family, namely near 150--170 K, making it attractive for a number of low-temperature applications. This material has been deposited by a variety of methods, including chemical vapor transport, rf sputtering of a stoichiometric target, pyrolysis, and heat treatment of a sputtered vanadium oxide film. Thin films of this material have also been prepared by the reduction of predeposited VO{sub 2} thin films, requiring the flow of hazardous gases such as hydrogen or carbon monoxide over the sample, which is held at high temperatures in excess of 700 {degree}C. A direct synthesis method for the deposition of high quality V{sub 2}O{sub 3} thin films with low infrared absorption and resistivity change of more than six orders of magnitude is described. Optical, resistivity, and morphological characteristics of this material are discussed.
- OSTI ID:
- 5562200
- Journal Information:
- Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 9:3; ISSN JVTAD; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
BEAMS
CHALCOGENIDES
DEPOSITION
ELECTRICAL PROPERTIES
ELECTRON BEAMS
FILMS
LEPTON BEAMS
MORPHOLOGY
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM OXIDES