Multidimensional ion microbeam analysis
Conference
·
OSTI ID:5557006
The nuclear microprobe is an instrument used to determine the atomic composition of the near-surface region of materials and is finding increasing use in a wide variety of scientific areas. When a scanning microprobe uses a depth-sensitive ion-beam analysis technique such as RBS, three dimensional analyses can be performed. This paper reviews current nuclear microbeam applications with emphasis on results involving such multidimensional profiling. 80 refs., 5 figs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 5557006
- Report Number(s):
- SAND-85-0874C; CONF-850716-2; ON: DE85014699
- Country of Publication:
- United States
- Language:
- English
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