Analysis of nitrogen-pulsed sputtered beryllium
Conference
·
OSTI ID:5556672
- Lawrence Berkeley Lab., CA (USA)
Mirror-quality beryllium films deposited by DC magnetron sputtering usually from columnar grain structures that are highly detrimental to the properties of the films. These columnar structures can be modified by imposing periodic pulses of nitrogen gas during sputtering. This paper describes ion microanalyses of beryllium films produced by this technique. 5 refs., 2 figs.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 5556672
- Report Number(s):
- UCRL-100796; CONF-8909172--2; ON: DE90001683
- Country of Publication:
- United States
- Language:
- English
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