Monolithic integration of semiconductor and superconductor components. Rept. for 1 Oct-31 Dec 91
Technical Report
·
OSTI ID:5546458
The goal of the program is to develop transistor technology compatible with high transition temperature superconductor technology so that transistor pixel switches can be integrated with yttrium barium copper oxide superconducting microbolometers in the same silicon substrate. A 4x4 matrix-addressable superconducting microbolometer array will be delivered at the completion of the program. Superconducting films of YBa2Cu3O7 were grown in-situ on 3 - inch silicon wafers coated with amorphous silicon wafers coated with amorphous silicon nitride and polycrystalline yttria stabilized zirconia.
- Research Organization:
- Honeywell, Inc., Minneapolis, MN (United States). Sensor and System Development Center
- OSTI ID:
- 5546458
- Report Number(s):
- AD-A-245351/2/XAB; CNN: N00014-90-C-0226
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
665412* -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
BOLOMETERS
CHALCOGENIDES
CRYSTAL GROWTH
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
MEASURING INSTRUMENTS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON NITRIDES
SUBSTRATES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SWITCHES
TECHNOLOGY ASSESSMENT
THIN FILMS
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
AMORPHOUS STATE
BOLOMETERS
CHALCOGENIDES
CRYSTAL GROWTH
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HIGH-TC SUPERCONDUCTORS
MEASURING INSTRUMENTS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON NITRIDES
SUBSTRATES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SWITCHES
TECHNOLOGY ASSESSMENT
THIN FILMS
TRANSISTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES
ZIRCONIUM COMPOUNDS
ZIRCONIUM OXIDES