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U.S. Department of Energy
Office of Scientific and Technical Information

Multi-cathode metal vapor arc ion source

Patent ·
OSTI ID:5542731

This patent describes an apparatus for generating an ion beam. It comprises: a vacuum enclosure; a support member; cathodes; an anode; means for transporting; a source of electrical power; means for producing an electric arc; means for guiding; and means for extracting ions.

Assignee:
The Regents of the Univ. of California, Berkeley, CA
Patent Number(s):
A; US 4785220
Application Number:
PPN: US 7-025335A
OSTI ID:
5542731
Country of Publication:
United States
Language:
English