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Photovoltaic devices using a-Si:H from higher order silanes. Final subcontract report, September 1, 1983-August 31, 1984

Technical Report ·
DOI:https://doi.org/10.2172/5537720· OSTI ID:5537720

This report describes the preparation of hydrogenated amorphous silicon (a-Si:H) films and photovoltaic devices by chemical vapor deposition (CVD) from higher silanes, and the properties of such films and devices. The motivation for this research is the prospect of preparing by a new technique a-Si:H having electronic properties similar (or superior) to material prepared by the well-known glow discharge technique. Possible advantages of thermal CVD are the absence of ion bombardment, high deposition rates, efficient utilization of feedstock gases, lower levels of impurity incorporation, absence of pinholes, and greater material stability. Photochemical vapor deposition of a-Si:H from disilane is also described and has yielded higher efficiency solar cells than thermal CVD.

Research Organization:
Chronar Corp., Princeton, NJ (USA)
DOE Contract Number:
AC02-83CH10093
OSTI ID:
5537720
Report Number(s):
SERI/STR-211-2637; ON: DE85008804
Country of Publication:
United States
Language:
English