Spatial and temporal variations of CF and CF{sub 2} radical densities in high-density CF{sub 4} plasmas studied by laser-induced fluorescence
- Department of Electronics, Nagoya University, Nagoya 464-01 (Japan)
Laser-induced fluorescence spectroscopy has been employed for the measurements of the ground-state CF and CF{sub 2} radical densities in low-pressure and high-density CF{sub 4} plasmas generated by helicon wave discharges. In the pulsed operation (5 Hz, 10 ms duration), the radial profiles of the CF and CF{sub 2} densities were hollow shape in the discharge phase, which indicates that both radicals were desorbed from the wall and were lost in the plasma column. In the continuous-wave operation, roughly uniform radial profiles were observed for both radicals. Therefore the desorbed radicals in the pulsed discharge seem to originate from the adsorbed species in the afterglow of the previous discharge. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 552955
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 11 Vol. 82; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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