High reflectance coatings and materials for the extreme ultraviolet
Conference
·
OSTI ID:552207
- NASA/Goddard Space Flight Center, Greenbelt, MD (United States); and others
Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency in the extreme ultraviolet/far ultraviolet (EUV/FUV) spectral region. For example, the development of chemical vapor deposited (CVD) SiC mirrors provides an opportunity to extend the range of normal incidence instruments down to 60 nm. The EUV performance and some applications of optical coatings including MgF{sub 2} protected aluminum, CVD-SiC, SiC films, boron carbide films, and multilayer coatings will be discussed. Contamination sensitivity and cleaning will be addressed.
- Research Organization:
- International Society for Optical Engineering, Washington, DC (United States)
- OSTI ID:
- 552207
- Report Number(s):
- CONF-9410155--Vol.2428
- Country of Publication:
- United States
- Language:
- English
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