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Absorption of ArF-, KrF- and XeF-laser radiation in optical materials at the moment of E-beam influence

Conference ·
OSTI ID:552188
;  [1]
  1. P.N. Lebedev Physical Institute, Moscow (Russian Federation)
The results of measurements of the optical density, induced at the moment of influence of the e-beam on crystal MgF{sub 2}, CaF{sub 2}, BaF{sub 2}, Al{sub 2}O{sub 3}, and also on different silica glasses, performed using laser radiation at 193, 248 and 353 nm, are presented and discussed.
Research Organization:
International Society for Optical Engineering, Washington, DC (United States)
OSTI ID:
552188
Report Number(s):
CONF-9410155--Vol.2428
Country of Publication:
United States
Language:
English

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