Air-bridge microbolometer for far-infrared detection

Journal Article · Sat Jan 14 23:00:00 EST 1984 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.94718· OSTI ID:5506448

Neikirk, D P; Rutledge, D B

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8 x 10/sup -11/ W(Hz)/sup -1//sup ///sup 2/. A thermal model is also presented that accurately fits the response of the detector.

• Research Organization: Division of Engineering and Applied Science, California Institute of Technology, Pasadena, California 91125
• DOE Contract Number: AM03-76SF00010
• OSTI ID: 5506448
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 44:2; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
AIR
BOLOMETERS
CHALCOGENIDES
DATA
ELECTROMAGNETIC RADIATION
EXPERIMENTAL DATA
FABRICATION
FLUIDS
FREQUENCY RANGE
GASES
INFORMATION
INFRARED RADIATION
INHIBITION
KHZ RANGE
KHZ RANGE 01-100
MATHEMATICAL MODELS
MEASURING INSTRUMENTS
MINERALS
MODULATION
NOISE
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PARTICLE MODELS
PHYSICAL PROPERTIES
QUARTZ
RADIATIONS
SENSITIVITY
SILICON COMPOUNDS
SILICON OXIDES
STATISTICAL MODELS
SUBSTRATES
THERMAL CONDUCTIVITY
THERMODYNAMIC MODEL
THERMODYNAMIC PROPERTIES