Hollow-cathode magnetron ion source

Journal Article · Sun Jan 01 04:00:00 EST 1984 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1137585· OSTI ID:5500654

Miljevic, V

A new type of ion source with axial extraction, based on hollow-cathode magnetron discharge, has been developed. Constant hydrogen ion currents in excess of 1 mA with an exit source aperture of 1 mm in diameter and accelerating voltages up to 3 kV, have been extracted axially from the cylindrical hollow cathode. Similar results have been obtained with helium, argon, and nitrogen plasmas.

• OSTI ID: 5500654
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 55:1; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
APERTURES
ARGON
BEAM PRODUCTION
BEAMS
CATHODES
CHARGED PARTICLES
CURRENTS
DESIGN
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELECTRODES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
ENERGY RANGE
EQUIPMENT
FABRICATION
FLUIDS
GASES
HELIUM
HOLLOW CATHODES
HYDROGEN IONS
ION BEAMS
ION SOURCES
IONS
KEV RANGE
KEV RANGE 01-10
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NITROGEN
NONMETALS
OPENINGS
PHYSICAL PROPERTIES
RARE GASES