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The dependence of low-temperature ion mixing of Y/Si bilayers on nuclear energy deposition

Journal Article · · Journal of Applied Physics; (USA)
DOI:https://doi.org/10.1063/1.348929· OSTI ID:5492487
;  [1];  [2]
  1. Materials Science and Engineering Department, Bard Hall, Cornell University, Ithaca, New York 14853 (USA)
  2. National Nanofabrication Facility, Cornell University, Ithaca, New York 14853 (USA)
Bilayers of yttrium and amorphous silicon were irradiated with 600-keV Ar{sup ++}, Kr{sup ++}, and Xe{sup ++} ions at temperatures between 80 and 372 K. The mixing rates were considerably larger than rates predicted by a model based on overlapping thermal spikes, as well as predictions generated by an extension of the model to the case of nonoverlapping thermal spikes. However, the experimental mixing rates did exhibit a linear dependence on the nuclear energy deposited at the interface. This agrees qualitatively with the premise of nonoverlapping thermal spikes. We compare our results with other ion-mixed medium-{ital Z}, metal/metal systems which also show this tendency.
OSTI ID:
5492487
Journal Information:
Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 69:11; ISSN 0021-8979; ISSN JAPIA
Country of Publication:
United States
Language:
English