Scanning Photoelectron Microscope (SPEM) with a zone plate generated microprobe

Conference · Sun Jan 01 04:00:00 EST 1989

OSTI ID:5480457

Ade, H; Kirz, J; Hulbert, S; Johnson, E; Anderson, E; Kern, D ^[1]

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1. State Univ. of New York, Stony Brook, NY (USA). Dept. of Physics

We describe instrumentation of a scanning photoelectron microscope (SPEM), which we are presently developing and commissioning at the X1A beamline of the National Synchrotron Light Source (NSLS). This instrument is designed to use the Soft X-ray Undulator (SXU) at the NSLS as a high brightness source to illuminate a Fresnel zone plate, thus forming a finely focused probe, {le} 0.2{mu}m in size, on the specimen surface. A grating monochromator selects the photon energy in the 400-800 eV range with an energy resolution better than 1 eV. The expected flux in the focus is in the 5 {times} 10{sup 7} {minus} 10{sup 9} photons/s range. A single pass Cylindrical Mirror Analyzer (CMA) is used to record photoemission spectra, or to form an image within a fixed electron energy bandwidth as the specimen is mechanically scanned. As a first test, a 1000 mesh Au grid was successfully imaged with Au 4 f primary photoelectrons, achieving a resolution of about 1{mu}m. 10 refs., 5 figs., 1 tab.

• Research Organization: Brookhaven National Lab., Upton, NY (USA)
• Sponsoring Organization: DOE/ER; NSF
• DOE Contract Number: AC02-76CH00016; AC03-76SF00098
• OSTI ID: 5480457
• Report Number(s): BNL-43339; CONF-890802--11; ON: DE90001552
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430303 -- Particle Accelerators-- Experimental Facilities & Equipment
440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ACCELERATORS
CYCLIC ACCELERATORS
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
EMISSION
ENERGY RESOLUTION
IONIZING RADIATIONS
MICROSCOPES
MICROSCOPY
NSLS
PHOTOEMISSION
RADIATION SOURCES
RADIATIONS
RESOLUTION
SCANNING ELECTRON MICROSCOPY
SECONDARY EMISSION
SOFT X RADIATION
SPECIFICATIONS
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
X RADIATION