Apparatus for etching vertical junction solar cell wafers
Patent
·
OSTI ID:5456647
An apparatus is disclosed for etching semiconductor wafers which comprises a cylindrical vessel with a lid having associated cooling means, a basket assembly, rack means for holding a plurality of wafers, support means for supporting the basket assembly above the bottom of the vessel, and stirring means.
- Assignee:
- Secretary of the Air Force
- Patent Number(s):
- US 4501636
- OSTI ID:
- 5456647
- Resource Relation:
- Patent File Date: Filed date 28 Dec 1983; Other Information: PAT-APPL-566444
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
36 MATERIALS SCIENCE
SEMICONDUCTOR MATERIALS
ETCHING
SILICON SOLAR CELLS
FABRICATION
EQUIPMENT
DIRECT ENERGY CONVERTERS
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE FINISHING
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture
36 MATERIALS SCIENCE
SEMICONDUCTOR MATERIALS
ETCHING
SILICON SOLAR CELLS
FABRICATION
EQUIPMENT
DIRECT ENERGY CONVERTERS
MATERIALS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE FINISHING
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture