Chemical selectivity in photon-stimulated desorption of fluorine from silicon
Journal Article
·
· Phys. Rev. Lett.; (United States)
Photon-stimulated desorption of F/sup +/ from Si(111) was studied with use of photon energies in the region of the Si 2p core level. Fluorinated surfaces with variable amounts of SiF/sub x/ groups were prepared, and distinct photon-stimulated--desorption thresholds in the Si 2p region were observed for F/sup +/ desorption from SiF vs SiF/sub 3/ surface groups. In addition, the angular distributions of the ejected F/sup +/ showed variations with respect to the Si(111) surface normal dependent on the bonding configuration, which were used to obtain local 2p absorption spectra for the individual SiF/sub x/ groups.
- Research Organization:
- IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
- OSTI ID:
- 5443441
- Journal Information:
- Phys. Rev. Lett.; (United States), Journal Name: Phys. Rev. Lett.; (United States) Vol. 60:10; ISSN PRLTA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ABSORPTION SPECTRA
BREMSSTRAHLUNG
CATIONS
CHARGED PARTICLES
CHEMICAL BONDS
COLLISIONS
DESORPTION
DISTRIBUTION
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
ENERGY DEPENDENCE
FLUORIDES
FLUORINE
FLUORINE COMPOUNDS
FLUORINE IONS
HALIDES
HALOGEN COMPOUNDS
HALOGENS
IONS
LIGHT SOURCES
NONMETALS
PHOTOEMISSION
PHOTON COLLISIONS
RADIATION SOURCES
RADIATIONS
SECONDARY EMISSION
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON FLUORIDES
SORPTIVE PROPERTIES
SPECTRA
SURFACE PROPERTIES
SYNCHROTRON RADIATION
360603* -- Materials-- Properties
ABSORPTION SPECTRA
BREMSSTRAHLUNG
CATIONS
CHARGED PARTICLES
CHEMICAL BONDS
COLLISIONS
DESORPTION
DISTRIBUTION
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
ENERGY DEPENDENCE
FLUORIDES
FLUORINE
FLUORINE COMPOUNDS
FLUORINE IONS
HALIDES
HALOGEN COMPOUNDS
HALOGENS
IONS
LIGHT SOURCES
NONMETALS
PHOTOEMISSION
PHOTON COLLISIONS
RADIATION SOURCES
RADIATIONS
SECONDARY EMISSION
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON FLUORIDES
SORPTIVE PROPERTIES
SPECTRA
SURFACE PROPERTIES
SYNCHROTRON RADIATION