Synthesis and electron field emission of nanocrystalline diamond thin films grown from N{sub 2}/CH{sub 4} microwave plasmas
- Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439 (United States)
- Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208 (United States)
- Department of Physics, University of Kaiserslautern, D-67663 Kaiserslautern (Germany)
Nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapor deposition using N{sub 2}/CH{sub 4} as the reactant gas without additional H{sub 2}. The nanocrystalline diamond phase has been identified by x-ray diffraction and transmission electron microscopy analyses. High resolution secondary ion mass spectroscopy has been employed to measure incorporated nitrogen concentrations up to 8{times}10{sup 20}atoms/cm{sup 3}. Electron field emission measurements give an onset field as low as 3.2V/{mu}m. The effect of the incorporated nitrogen on the field emission characteristics of the nanocrystalline films is discussed. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 543783
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 9 Vol. 82; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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