Elastic and inelastic surface effects on ion penetration and the resulting sputtering and backscattering

Conference · Tue Jan 01 04:00:00 EST 1985

OSTI ID:5437575

Hassanein, A M; Smith, D L

The computer code ITMC (Ion Transport in Materials and Compounds) has been developed to study in detail the transport of charged particles in solid materials and surface related phenomena such as sputtered atoms and backscattered ions. The code is based on Monte Carlo methods to follow the path and the damage produced by the charged particles in three dimension as they slow down in target materials. Single-element targets as well as alloys with possible different surface and bulk compositions or with layered structures of different materials can be used. Various models developed to calculate the inelastic energy losses with target electrons can be used in the code. Most known interatomic potentials can also be used to calculate the elastic energy losses. The major advantages of the code are its ability and flexibility to use and compare various models of elastic and inelastic energy losses in any target with different compounds and different surface and bulk composition.

• Research Organization: Argonne National Lab., IL (USA)
• DOE Contract Number: W-31109-ENG-38
• OSTI ID: 5437575
• Report Number(s): CONF-850813-1; ON: DE85016604
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700209* -- Fusion Power Plant Technology-- Component Development & Materials Testing
BACKSCATTERING
CHARGED PARTICLES
COMPUTER CODES
ELASTIC SCATTERING
I CODES
INELASTIC SCATTERING
ION IMPLANTATION
MATERIALS
MONTE CARLO METHOD
SCATTERING
SPUTTERING
THERMONUCLEAR REACTOR MATERIALS