Broad-beam multi-ampere metal ion source

Conference · Thu Jun 01 04:00:00 EDT 1989

OSTI ID:5415925

Brown, I G; Galvin, J E; MacGill, R A; Paoloni, F J ^[1]

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1. Lawrence Berkeley Lab., CA (USA)

An embodiment of the MEVVA (metal vapor vacuum arc) high current metal ion source has been developed in which the beam is formed from a 10-cm diameter set of extractor grids and which produces a peak beam current of up to several Amperes. The source, MEVVA V, operates in a pulsed mode with a pulse width at present 0.25 ms and a repetition rate of up to several tens of pulses per second (power supply limited). The multicathode feature that was developed for the prior source version, MEVVA IV, has been incorporated here also; one can switch between any of 18 separate cathodes and thus metallic beam species. Maximum beam extraction voltage is over 90 kV, and since the ion charge state typically from Q = 1 to 5, depending on the metal employed, the ion energy in the extracted beam can thus be up to several hundred keV. This source is a new addition to the MEVVA family of metal ion sources, and we are at present investigating the operational regimes and the limits to the source performance. In this paper we describe the source and present some preliminary results. 10 refs., 4 figs.

• Research Organization: Lawrence Berkeley Lab., CA (USA)
• Sponsoring Organization: DOD; DOE/ER
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 5415925
• Report Number(s): LBL-26842; CONF-890703--25; ON: DE90003106
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
430301* -- Particle Accelerators-- Ion Sources
BEAM CURRENTS
BEAM INJECTION
CURRENTS
DESIGN
ION IMPLANTATION
ION SOURCES