Radiolysis of resist polymers. 1. Poly(methyl-alpha-haloacrylates) and copolymers with methylmethacrylate. Technical report. [Gamma radiation]
Technical Report
·
OSTI ID:5414316
Methyl alpha-chloroacrylate (MCA) and methyl alpha-bromoacrylate (MBA) were copolymerized with methyl methacrylate (MMA) over a broad range of composition. The copolymers were exposed to gamma-radiation to determine chain scission susceptibility. The mechanisms of degradation of copolymers towards radiation was suggested from product analysis. The radiolysis of copolymers of MMA with MCA and MBA are dominated by the alpha-halogenated monomers.
- Research Organization:
- Massachusetts Univ., Amherst (USA). Materials Research Lab.
- OSTI ID:
- 5414316
- Report Number(s):
- AD-A-131864/1; TR-1
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
400600* -- Radiation Chemistry
ACRYLIC ACID ESTERS
BROMINE
CARBOXYLIC ACID ESTERS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
COPOLYMERIZATION
COPOLYMERS
DECOMPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
ESTERS
GAMMA RADIATION
HALOGENS
IONIZING RADIATIONS
METHACRYLIC ACID ESTERS
METHYL METHACRYLATE
MOLECULAR STRUCTURE
MONOMERS
NONMETALS
ORGANIC BROMINE COMPOUNDS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
POLYACRYLATES
POLYMERIZATION
POLYMERS
POLYVINYLS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIATIONS
RADIOLYSIS
400600* -- Radiation Chemistry
ACRYLIC ACID ESTERS
BROMINE
CARBOXYLIC ACID ESTERS
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
COPOLYMERIZATION
COPOLYMERS
DECOMPOSITION
ELECTROMAGNETIC RADIATION
ELEMENTS
ESTERS
GAMMA RADIATION
HALOGENS
IONIZING RADIATIONS
METHACRYLIC ACID ESTERS
METHYL METHACRYLATE
MOLECULAR STRUCTURE
MONOMERS
NONMETALS
ORGANIC BROMINE COMPOUNDS
ORGANIC CHLORINE COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
ORGANIC POLYMERS
POLYACRYLATES
POLYMERIZATION
POLYMERS
POLYVINYLS
RADIATION CHEMISTRY
RADIATION EFFECTS
RADIATIONS
RADIOLYSIS