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Radiolysis of resist polymers. 1. Poly(methyl-alpha-haloacrylates) and copolymers with methylmethacrylate. Technical report. [Gamma radiation]

Technical Report ·
OSTI ID:5414316
Methyl alpha-chloroacrylate (MCA) and methyl alpha-bromoacrylate (MBA) were copolymerized with methyl methacrylate (MMA) over a broad range of composition. The copolymers were exposed to gamma-radiation to determine chain scission susceptibility. The mechanisms of degradation of copolymers towards radiation was suggested from product analysis. The radiolysis of copolymers of MMA with MCA and MBA are dominated by the alpha-halogenated monomers.
Research Organization:
Massachusetts Univ., Amherst (USA). Materials Research Lab.
OSTI ID:
5414316
Report Number(s):
AD-A-131864/1; TR-1
Country of Publication:
United States
Language:
English