Properties of CeO/sub 2/ thin films prepared by oxygen-ion-assisted deposition
Thin films have been prepared by electron-beam evaporation of CeO/sub 2/, where the growing film has been bombarded with oxygen ions. The packing density of the films has been increased from approx. 0.55 without ion bombardment to unity with bombardment as determined by moisture adsorption measurements. The refractive index, extinction coefficient, and scattering loss are reported for a range of ion energies from 50 to 1200 eV. The ratio of ion-current density to film growth rate required to produce films that did not absorb moisture was found to be a minimum for ion energies in the 300--600-eV range. Absorption and scatter losses are smallest for the lower ion energies and the crystal structure of CeO/sub 2/ films is relatively stable under ion bombardment although ion-assisted films tend to be less crystalline than evaporated layers.
- Research Organization:
- CSIRO Division of Applied Physics, Sydney, 2070, Australia
- OSTI ID:
- 5412423
- Journal Information:
- Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 24:14; ISSN APOPA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAMS
CERIUM COMPOUNDS
CERIUM OXIDES
CHALCOGENIDES
CHARGED PARTICLES
CURRENT DENSITY
DENSITY
DEPOSITION
ELECTRON BEAMS
ENERGY BEAM DEPOSITION
ENERGY LOSSES
ENERGY RANGE
EV RANGE
EV RANGE 10-100
EV RANGE 100-1000
FILMS
ION BEAMS
IONS
LEPTON BEAMS
LOSSES
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
OXYGEN IONS
PARTICLE BEAMS
PHYSICAL PROPERTIES
RARE EARTH COMPOUNDS
REFRACTIVITY
SCATTERING
SURFACE COATING
THIN FILMS