X-ray zone plates fabricated using electron-beam and x-ray lithography

Conference · Mon Jan 01 00:00:00 EST 1979

OSTI ID:5412333

Shaver, D C; Flanders, D C; Ceglio, N M; Smith, H I

Fresnel zone plate patterns, free of spherical abberation, with diameters of up to 0.63 mm and linewidths as small as 1000 A were fabricated on polyimide-membrane x-ray masks using scanning electron beam lithography Distortion of the electron beam scan raster was reduced to < 2500 A over a 2 mm x 2 mm field by applying deflection corrections, while viewing the distortion using a moire method. C/sub k/ x-ray lithography was used to replicate the zone plate pattern in thick PMMA over a 100 A thick plating base on a glass substrate. Zones plates in 1.3 ..mu..m thick gold were fabricated by plating, and made free-standing by removal of the plating base and the supporting glass substrate. Zone plates were tested as imaging elements with visible light and soft x-rays.

• Research Organization: Massachusetts Inst. of Tech., Lexington (USA). Lincoln Lab.; California Univ., Livermore (USA). Lawrence Livermore Lab.; Massachusetts Inst. of Tech., Cambridge (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5412333
• Report Number(s): UCRL-84043; CONF-7905140-1; TRN: 80-007550
• Resource Relation: Conference: 15. symposium on electron, ion and photon beam technology, Boston, MA, USA, May 1979
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
FRESNEL LENS
FABRICATION
SOFT X RADIATION
FOCUSING
MEMBRANES
MONOCHROMATORS
PLATES
X-RAY EQUIPMENT
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
LENSES
RADIATIONS
X RADIATION
440103* - Radiation Instrumentation- Nuclear Spectroscopic Instrumentation