Methods of experimental physics. Volume 14. Vacuum physics and technology
Book
·
OSTI ID:5396321
- ed.
Contributions from several authors on the design, operation, fabrication, performance, materials, maintenance, and control of vacuum systems are presented. The various vacuum pumps and vacuum gages are discussed in detail. Safety considerations and protective devices for vacuum systems are considered, and the art of leak detection and repair is discussed. Also, the two basic vacuum techniques for producing thin films, vacuum evaporation and sputter deposition, are described. (WHK)
- OSTI ID:
- 5396321
- Country of Publication:
- United States
- Language:
- English
Similar Records
Vacuum Technology
Practical machinery management for process plants. Volume 4: Major process equipment maintenance and repair
User's guide to vacuum technology
Book
·
Fri Oct 15 00:00:00 EDT 2004
·
OSTI ID:1018758
Practical machinery management for process plants. Volume 4: Major process equipment maintenance and repair
Book
·
Mon Dec 31 23:00:00 EST 1984
·
OSTI ID:7004696
User's guide to vacuum technology
Book
·
Mon Dec 31 23:00:00 EST 1979
·
OSTI ID:6121345
Related Subjects
42 ENGINEERING
420700* -- Engineering-- Vacuum Engineering-- (-1987)
CONTROL SYSTEMS
DEGASSING
DEPOSITION
DESIGN
EQUIPMENT
FABRICATION
GETTERING
HAZARDS
HIGH VACUUM
LABORATORY EQUIPMENT
LEAK TESTING
MAINTENANCE
MATERIALS
MEASURING INSTRUMENTS
OPERATION
PERFORMANCE
PRESSURE GAGES
PUMPS
REPAIR
SAFETY
SPUTTERING
SURFACE COATING
TESTING
ULTRAHIGH VACUUM
VACUUM COATING
VACUUM GAGES
VACUUM PUMPS
VACUUM SYSTEMS
420700* -- Engineering-- Vacuum Engineering-- (-1987)
CONTROL SYSTEMS
DEGASSING
DEPOSITION
DESIGN
EQUIPMENT
FABRICATION
GETTERING
HAZARDS
HIGH VACUUM
LABORATORY EQUIPMENT
LEAK TESTING
MAINTENANCE
MATERIALS
MEASURING INSTRUMENTS
OPERATION
PERFORMANCE
PRESSURE GAGES
PUMPS
REPAIR
SAFETY
SPUTTERING
SURFACE COATING
TESTING
ULTRAHIGH VACUUM
VACUUM COATING
VACUUM GAGES
VACUUM PUMPS
VACUUM SYSTEMS