User's guide to vacuum technology
Book
·
OSTI ID:6121345
This is a comprehensive review of vacuum technology written for today's system users, i.e., students, technicians, engineers, managers, and scientists in volved in semiconductors, optics, and related areas. The emphasis is on the understanding, selection and operation of equipment for the production of process environments. Topics discussed include: residual gas analysis; interpretation of RGA data; material properties; pumping oxygen safely and properties of modern pump fluids; diffusion, ion, turbomolecular, and cryogenic pumps; suitability of the four pump types for high vacuum, ultra-high vacuum, and high gas flow applications; design for hazardous gas pumping - significant in several semiconductor processes; and economics of purchasing, owning, and operating vacuum equipment, and methods of conserving energy.
- OSTI ID:
- 6121345
- Country of Publication:
- United States
- Language:
- English
Similar Records
Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
An ancillary pumping system for the APS vacuum system
High Insulating Vacuum Pump Cart Analysis
Patent
·
Tue Apr 04 00:00:00 EDT 2006
·
OSTI ID:1175684
An ancillary pumping system for the APS vacuum system
Conference
·
Sun Jun 01 00:00:00 EDT 1997
·
OSTI ID:491362
High Insulating Vacuum Pump Cart Analysis
Conference
·
Mon Jul 28 00:00:00 EDT 2025
· No journal information
·
OSTI ID:2574869