Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Interactions of molecular and ion beams with surfaces. Report No. 1 (final) 1 Jan 1977-31 May 1979

Technical Report ·
OSTI ID:5392994
Low kinetic energy active ion bombardment of transition metals, Si, Ge, Sn, Pb, graphite, and diamond have shown that chemical reactions can be induced between ion beams and surfaces. These reactions are specific and selective with respect to the ion-target combination and the thickness of the reacted layer can be controlled by varying the ion energy. The techniques of x-ray and UV photoelectron spectroscopy, Auger spectroscopy, secondary ion mass spectrometry (SIMS) and thermal desorption spectrometry (TDS) under ultra-high vacuum conditions are used to characterize the products of the beam-surface reactions. The reaction of 30-3000 eV nitrogen beams with the first-row transition metals results in the formation of metal nitrides. The amount of nitrogen reacting with the metal can be correlated to the enthalpy of formation of the metal nitride. Reactions of nitrogen with M, MO, and MO2 (M = Si, Ge, Sn, Pb) produces nitrides with no evidence for nitrate, nitrite, or nitroso formation in the oxides. A mechanism is proposed for the reaction which involves charge exchange neutralization and dissociation of the ion at the surface followed by penetration into the lattice, thermalization, and finally chemical reaction.
Research Organization:
Houston Univ., TX (USA). Dept. of Chemistry
OSTI ID:
5392994
Report Number(s):
AD-A-073278
Country of Publication:
United States
Language:
English

Similar Records

Interactions of molecular ion beams with surfaces. Report No. 1 (final) 1 Jul 79-30 Jun 80
Technical Report · Mon Sep 08 00:00:00 EDT 1980 · OSTI ID:6429188
Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxides
Journal Article · Tue Feb 14 23:00:00 EST 1978 · J. Chem. Phys.; (United States) · OSTI ID:5202240
Interactions of ion beams with surfaces: Dynamics of the reaction of N/sub 2//sup +/ with rhenium
Journal Article · Sun Jun 01 00:00:00 EDT 1980 · J. Chem. Phys.; (United States) · OSTI ID:5338392

Related Subjects

38 RADIATION CHEMISTRY, RADIOCHEMISTRY, AND NUCLEAR CHEMISTRY
400600* -- Radiation Chemistry
BEAMS
CARBON
CHEMICAL RADIATION EFFECTS
CHEMICAL REACTIONS
CHEMISTRY
COLLISIONS
CORROSION
DAMAGE
DIAMONDS
DIMENSIONS
ELECTRON SPECTROSCOPY
ELEMENTS
ENERGY
EROSION
FREE ENERGY
GERMANIUM
GRAPHITE
ION BEAMS
ION COLLISIONS
ION-ION COLLISIONS
LAYERS
LEAD
MASS SPECTROSCOPY
METALS
MINERALS
MOLECULAR BEAMS
NONMETALS
PHYSICAL PROPERTIES
RADIATION CHEMISTRY
RADIATION EFFECTS
SEMIMETALS
SILICON
SPECTRA
SPECTROSCOPY
SPUTTERING
SURFACE ENERGY
SURFACE PROPERTIES
THERMODYNAMIC PROPERTIES
THICKNESS
TIN
ULTRAVIOLET SPECTRA