Interactions of ion beams with surfaces. Reactions of nitrogen with silicon and its oxides

Journal Article · Wed Feb 15 04:00:00 EST 1978 · J. Chem. Phys.; (United States)

DOI:https://doi.org/10.1063/1.435869· OSTI ID:5202240

Taylor, J A; Lancaster, G M; Ignatiev, A; Rabalais, J W

Ion beam studies of chemical reactions between nitrogen and surfaces of silicon and its oxides are reported. A spectrometer system designed for these studies which combines the techniques of x-ray and uv photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectroscopy, low energy electron diffraction, and ion bombardment is described. This work employs XPS and UPS to examine the products induced by 500 eV N/sup +//sub 2/ beams on targets of elemental Si, SiO, and SiO/sub 2/. The N/sup +//sub 2/ ions undergo charge exchange and dissociation at the surface of the target to form hot N atoms. Reaction with Si, produces nitrides which are similar to those of the type Si/sub 3/N/sub 4/. Reaction with SiO and SiO/sub 2/ forms nitrides, with no evidence of nitrate or nitrite formation. The chemical nature of the reaction is suggested by identification of the reaction products through XPS and UPS and energy level shifts. The thickness of the silicon nitride layer on Si(111) formed by 500 eV N/sup +//sub 2/ bombardment has been determined to be approx.19 A thick by using the film/bulk Si XPS intensity ratio. Estimates obtained by depth-concentration profiling with 1 keV Ar/sup +/ and by using LSS projected ion range calculations agree with this approximate thickness.

• Research Organization: Departments of Chemistry and Physics, University of Houston, Houston, Texas 77004
• OSTI ID: 5202240
• Journal Information: J. Chem. Phys.; (United States), Journal Name: J. Chem. Phys.; (United States) Vol. 68:4; ISSN JCPSA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL REACTIONS
COLLISIONS
ELEMENTS
ION BEAMS
ION COLLISIONS
IONS
NITROGEN IONS
OXIDES
OXYGEN COMPOUNDS
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SURFACES