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Growth mechanisms of epitaxial metallic oxide SrRuO{sub 3} thin films studied by scanning tunneling microscopy

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.119616· OSTI ID:538382
; ;  [1]
  1. Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina 27708 (United States)

We report the deliberately controlled growth of epitaxial metallic oxide SrRuO{sub 3} thin films in three distinctly different growth modes. Scanning tunneling microscopy and x-ray diffraction indicate that the growth mechanism for films on exact (001) SrTiO{sub 3} substrates is two-dimensional nucleation, which results in a two domain in-plane structure. As the miscut angle of vicinal (001) SrTiO{sub 3} substrates is increased, the growth mechanism changes to step flow which leads to single domain thin films. Films on (001) LaAlO{sub 3} substrates have an incoherent three-dimensional island growth due to the large lattice mismatch, resulting in a bulk-like lattice. The vast difference in the growth mechanisms of these films leads to a corresponding difference in their electrical transport and magnetic behavior. Such nanoscale control of growth mechanism, surface morphology, and domain structure can be very important in the fabrication of novel perovskite oxide devices. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
538382
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 9 Vol. 71; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English