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Title: Energy straggling for medium-energy H sup + beams penetrating Cu, Ag, and Pt

Journal Article · · Physical Review A. General Physics; (United States)
 [1];  [2]
  1. Department of Physics, Ritsumeikan University, Toji-in, Kita-ku, Kyoto 603, Japan (JP)
  2. Osaka Electro-Communication University, Hatsu-cho, Neyagawa, Osaka 572, Japan (JP)

The electronic-energy-straggling values for 50--250-keV H{sup +} beams penetrating Cu, Ag, and Pt have been measured using backscattering. The Cu, Ag, and Pt layers with a thickness of about 30 nm were deposited onto Si, SiO{sub 2}, Al{sub 2}O{sub 3}, and ZrO{sub 2} substrates with electron beams or by sputtering. The uniformity and grain growth of the thin films were observed by cross-section transmission electron microscopy (TEM) and diffraction. The thickness fluctuation determined by TEM is less than 2 nm. The backscattering spectra were obtained with an electrostatic toroidal analyzer with an energy resolution (standard deviation) of 150--200 eV, and the computer-simulated spectrum analysis has given the best-fit values of the energy straggling. The derived straggling values are compared with the theoretical values calculated from the extended Lindhard-Winther theory using the local electron density of the Hartree-Fock-Slater atomic model. Discussion is also made in terms of the short-range correlation effect proposed by Sigmund (Phys. Rev. A 26, 2497 (1982)).

OSTI ID:
5374564
Journal Information:
Physical Review A. General Physics; (United States), Vol. 44:3; ISSN 1050-2947
Country of Publication:
United States
Language:
English