Production of fine ceramic powders from chloromethylsilanes using pulsed excimer radiation

Journal Article · Sat Jul 01 04:00:00 EDT 1989 · Journal of the American Ceramic Society; (USA)

DOI:https://doi.org/10.1111/j.1151-2916.1989.tb09695.x· OSTI ID:5374299

O'Neill, J A; Horsburgh, M; Tann, J; Grant, K J; Paul, G L ^[1]; Sinclair, W ^[2]

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1. Centre for Industrial Laser Applications, Univ. of New South Wales, Kensington, New South Wales 2033 (AU)
2. BHP Melbourne Research Labs., Mulgrave, Victoria 3170 (AU)

This paper discusses ceramic powders produced by the photodecomposition of chloromethylsilanes using a pulsed excimer laser operating at 193 nm. These feedstocks are cheaper and easier to handle than SiH/sub 4/, the main feedstock used in earlier work using continuous-wave CO/sub 2/ lasers as the irradiation source. Powders were produced from photolysis of silanes containing methyl groups without the addition of any coreagents, while the two silanes tested containing only chlorine and hydrogen ligands, SiCl/sub 3/H and SiCl/sub 4/, required the addition of H/sub 2/ as a coreagent for significant yields of powder to be produced. The powders produced were found to be low in chlorine, with amorphous Si powders or {beta}-SiC being produced depending on feedstock. Particle sizes measured from electron micrographs varied from less than 10 nm to 1.5 {mu}m.

• OSTI ID: 5374299
• Journal Information: Journal of the American Ceramic Society; (USA), Journal Name: Journal of the American Ceramic Society; (USA) Vol. 72:7; ISSN JACTA; ISSN 0002-7820
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400500 -- Photochemistry
AMORPHOUS STATE
CARBIDES
CARBON COMPOUNDS
CARBON DIOXIDE LASERS
CHEMICAL FEEDSTOCKS
CHEMICAL REACTIONS
CHLORIDES
CHLORINE
CHLORINE COMPOUNDS
DECOMPOSITION
ELECTRON MICROSCOPY
ELEMENTS
EXCIMER LASERS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HALOGENS
HYDRIDES
HYDROGEN
HYDROGEN COMPOUNDS
LASERS
LIGANDS
MICROSCOPY
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
PARTICLE SIZE
PHOTOCHEMICAL REACTIONS
PHOTOLYSIS
POWDERS
SILANES
SILICON CARBIDES
SILICON CHLORIDES
SILICON COMPOUNDS
SIZE
SYNTHESIS