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Substrate heating measurements in pulsed ion beam film deposition

Conference ·
; ; ;  [1];  [2];  [3]
  1. Los Alamos National Lab., NM (United States)
  2. Cornell Univ., Ithaca, NY (United States). Materials Science and Engineering Dept.
  3. Sandia National Labs., Albuquerque, NM (United States)
+ Show Author Affiliations
Diamond-like Carbon (DLC) films have been deposited at Los Alamos National Laboratory by pulsed ion beam ablation of graphite targets. The targets were illuminated by an intense beam of hydrogen, carbon, and oxygen ions at a fluence of 15-45 J/cm{sup 2}. Ion energies were on the order of 350 keV, with beam current rising to 35 kA over a 400 ns ion current pulse. Raman spectra of the deposited films indicate an increasing ratio of sp{sup 3} to sp{sup 2} bonding as the substrate is moved further away from the target and further off the target normal. Using a thin film platinum resistor at varying positions, we have measured the heating of the substrate surface due to the kinetic energy and heat of condensation of the ablated material. This information is used to determine if substrate heating is responsible for the lack of DLC in positions close to the target and near the target normal. Latest data and analysis will be presented.
Research Organization:
Los Alamos National Lab., NM (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-36
OSTI ID:
53715
Report Number(s):
LA-UR--95-1281; CONF-950412--4; ON: DE95010862
Country of Publication:
United States
Language:
English

References (8)

Time-resolved temperature measurements during rapid solidification of Si-As alloys induced by pulsed-laser melting journal April 1993
Temperature measurements of polyimide during KrF excimer laser ablation journal November 1992
Time‐resolved temperature measurements during pulsed laser irradiation using thin film metal thermometers journal September 1993
Direct measurements of liquid/solid interface kinetics during pulsed-laser-induced melting of aluminum journal January 1986
Microsecond pulse width, intense, light-ion beam accelerator journal October 1993
Melt dynamics of silicon‐on‐sapphire during pulsed laser annealing journal March 1983
Preparation of diamondlike carbon films by high-intensity pulsed-ion-beam deposition journal November 1994
Vapor deposition processes for amorphous carbon films with sp 3 fractions approaching diamond journal August 1991

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Related Subjects

36 MATERIALS SCIENCE
ABLATION
DEPOSITION
DIAMONDS
FILMS
GRAPHITE
HEATING
ION BEAMS
IRRADIATION
SUBSTRATES
TEMPERATURE DEPENDENCE