Optical lithographic technique for fabricating submicron-sized Josephson microbridges. [Patent application]

Patent ·

OSTI ID:5362580

Jelks, E C; Kerber, G L; Wilcox, H A

Planar superconducting-normal-superconducting (SNS) Josephson microbridges and superconducting quantum interference devices (SQUIDs) with bridge widths of about 0.2 microns and lengths of about 0.1 micron or less are fabricated with the aid of a technique referred to as 'shadow evaporation'. The procedure permits the submicron dimensions to be set by edge film thickness and slant evaporation angle, both of which can be accurately measured. Microbridges have been constructed with vanadium banks or electrodes and gold-titanium bridges, although other materials can be used including superconducting metals for the bridge. It is expected that a refined version of this technique would be suitable for repeated batch fabrication of single and multiple Josephson microbridges.

• Assignee: ERA-07-041239; EDB-82-104176
• Patent Number(s): None
• OSTI ID: 5362580
• Country of Publication: United States
• Language: English

Related Subjects

420201* -- Engineering-- Cryogenic Equipment & Devices
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALLOYS
ELECTRIC BRIDGES
ELECTRICAL EQUIPMENT
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FABRICATION
FLUXMETERS
GOLD ALLOYS
JOSEPHSON JUNCTIONS
JUNCTIONS
MEASURING INSTRUMENTS
METALS
MICROELECTRONICS
MICROWAVE EQUIPMENT
SQUID DEVICES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING JUNCTIONS
TITANIUM ALLOYS
TRANSITION ELEMENTS
VANADIUM