Alternatives in fabricating submicron niobium Josephson junctions
Conference
·
· AIP Conf. Proc.; (United States)
OSTI ID:5153139
The fabrication of submicron niobium microbridges and submicron niobium tunneljunctions is discussed. Several techniques are described to fabricate niobium microbridges. The most important of them is a technique in which niobium is evaporated through a bakable submicron mask. The technique to fabricate submicron tunneljunctions is basically a shadow evaporation technique. In contrast to earlier attempts it is a reproducible method suitable for large scale application.
- Research Organization:
- Univ. of Technology, Delft, Netherlands
- OSTI ID:
- 5153139
- Report Number(s):
- CONF-780339-
- Conference Information:
- Journal Name: AIP Conf. Proc.; (United States) Journal Volume: 44
- Country of Publication:
- United States
- Language:
- English
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