Uniformity of 1.3-{micro}m laser diodes with butt-jointed selectively grown spot-size converter fabricated on 2-inch InP substrates
Book
·
OSTI ID:536216
- NTT Opto-electronics Labs., Atsugi, Kanagawa (Japan); and others
A spot-size converted laser diode (SSC-LD) is an attractive device for low cost optical modules because it provides low-loss coupling to a single-mode fiber and to a Planar Lightwave Circuit (PLC) without using lenses as well as large alignment tolerance. A key process for the uniform fabrication of the SSC-LD is the uniform etching of the active region in preparation for butt-joint growth. In this report, the authors demonstrate SSC-LDs on 2-inch InP substrates with good uniform characteristics by using a combination of uniform epitaxial growth, wet etching, and dry etching.
- OSTI ID:
- 536216
- Report Number(s):
- CONF-960498--; ISBN 0-7803-3283-0
- Country of Publication:
- United States
- Language:
- English
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