Carrier gas-free chemical vapor deposition technique for in situ preparation of high quality YBa sub 2 Cu sub 3 O sub 7 minus. delta. thin films

Journal Article · Mon Aug 12 00:00:00 EDT 1991 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.105263· OSTI ID:5361125

Schulte, B; Maul, M ^[1]; Becker, W; Schlosser, E G; Elschner, S; Haeussler, P ^[2]; Adrian, H ^[3]

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1. Hoechst AG, Central Research II, 6230 Frankfurt, Germany (DE) Institut fuer Festkoerperphysik, TH Darmstadt, 6100 Darmstadt, Germany (DE)
2. Hoechst AG, Central Research II, 6230 Frankfurt, Germany (DE)
3. Institut fuer Festkoerperphysik, TH Darmstadt, 6100 Darmstadt, Germany (DE)

A new carrier gas-free metalorganic chemical vapor deposition technique was developed yielding a high deposition rate. The {beta}-dicetonate precursor compounds were synthesized with reproducible water content which is of great importance for their vapor pressure. With the technique described above {bold c}-axis oriented YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} thin films were prepared with {ital T}{sub {ital c}}({ital R}=0)=91.8 K and {ital j}{sub {ital c}}(77 K)=1.3{times}10{sup 6} A/cm{sup 2} on (100)SrTiO{sub 3} substrates and {ital T}{sub {ital c}}({ital R}=0)=91.1 K and {ital j}{sub {ital c}}(77 K)=3{times}10{sup 5} A/cm{sup 2} on (100)MgO substrates at {ital B}=0 T. The influence of the metal composition on the formation of precipitation was studied by SEM investigations.

• OSTI ID: 5361125
• Journal Information: Applied Physics Letters; (United States), Vol. 59:7; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
COPPER OXIDES
SUPERCONDUCTING FILMS
YTTRIUM OXIDES
HIGH-TC SUPERCONDUCTORS
PRECIPITATION
QUATERNARY COMPOUNDS
SCANNING ELECTRON MICROSCOPY
TRANSITION TEMPERATURE
ALKALINE EARTH METAL COMPOUNDS
AMINES
AMMONIUM COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COPPER COMPOUNDS
DEPOSITION
ELECTRON MICROSCOPY
FILMS
MICROSCOPY
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SEPARATION PROCESSES
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360602* - Other Materials- Structure & Phase Studies
360603 - Materials- Properties