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High-efficiency mirror finishing characteristics of ceramics with extremely fine grit diamond wheels

Conference ·
OSTI ID:535585
 [1]; ;  [2]
  1. SpeedFam Co., Ltd., Kanagawa (Japan)
  2. Tohoku Univ., Sendai (Japan)

In order to solve the problems of the loose abrasive method, such as low fishing efficiency, etc., a new vertical type ultra-precision plane honing machine using an extremely fine grit diamond wheel was developed by the authors for mirror finishing of hard and brittle materials including ceramics as a bonded abrasive method. Using this machine, the high-efficiency mirror finishing of ceramics was carried out successfully. In this paper, the theoretical model and formulas of plane honing are presented along with the results of a few experiments for examining the high-efficiency mirror finishing characteristics of ceramics using extremely fine grit diamond wheels.

OSTI ID:
535585
Report Number(s):
CONF-961111--
Country of Publication:
United States
Language:
English

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