Studies of chemical vapor deposition of amorphous silicon and transparent electrodes for solar cells. Final report, 1 April 1983-30 September 1984
This report presents results of research on atmospheric-pressure chemical vapor deposition (APCVD), a promising alternative deposition technique for preparing hydrogenated amorphous silicon for use in thin-film solar cells and for preparing transparent conductive electrode layers. The lack of ion bombardment, the observed high deposition rates, and the overall simplicity of the technology could mean a sizable cost reduction in the large-scale manufacturing of amorphous silicon solar cells. Solar cells with at least 8% efficiency should be possible with APCVD amorphous silicon. Titanium nitride films produced by APCVD were shown to provide low-resistance electrical contact to tin oxide and also to highly doped silicon (both p and n-type, crystalline and amorphous).
- Research Organization:
- Harvard Univ., Cambridge, MA (USA). Dept. of Chemistry
- DOE Contract Number:
- AC02-83CH10093
- OSTI ID:
- 5330500
- Report Number(s):
- SERI/STR-211-2695; ON: DE85016848
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
ABSORPTION
AMORPHOUS STATE
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIFFUSION BARRIERS
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRODES
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
MATERIALS
NITRIDES
NITROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
RESEARCH PROGRAMS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS
TIN COMPOUNDS
TIN OXIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
ABSORPTION
AMORPHOUS STATE
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIFFUSION BARRIERS
DIRECT ENERGY CONVERTERS
EFFICIENCY
ELECTRIC CONDUCTIVITY
ELECTRIC CONTACTS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
ELECTRODES
ELEMENTS
EQUIPMENT
FABRICATION
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
MATERIALS
NITRIDES
NITROGEN COMPOUNDS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
PNICTIDES
RESEARCH PROGRAMS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS
TIN COMPOUNDS
TIN OXIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS