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Self-modulating ion gauge

Journal Article · · J. Vac. Sci. Technol.; (United States)
DOI:https://doi.org/10.1116/1.570386· OSTI ID:5327049
A Bayard--Alpert ionization pressure gauge has been modified by shortening the collector wire thereby reducing the x-ray limit from approx.2.5 x 10/sup -11/ to approx.0.6 x 10/sup -11/ Torr. In addition it has proven possible to modulate this gauge and thus make an in situ determination of the x-ray limit without the introduction of a modulation electrode. Thus a self-modulating, low x-ray limit ion gauge has been developed at reasonably low cost and seems particularly suited to the ISABELLE ultrahigh vacuum system.
Research Organization:
Brookhaven National Labortory, Upton, New York 12101
OSTI ID:
5327049
Journal Information:
J. Vac. Sci. Technol.; (United States), Journal Name: J. Vac. Sci. Technol.; (United States) Vol. 17:1; ISSN JVSTA
Country of Publication:
United States
Language:
English

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