Hydrogenated amorphous silicon-germanium alloys

Technical Report · Mon Feb 01 04:00:00 EST 1988

OSTI ID:5323397

Luft, W

This report describes the effects of the germanium fraction in hydrogenated amorphous silicon-germanium alloys on various parameters, especially those that are indicators of film quality, and the impact of deposition methods, feedgas mixtures, and other deposition parameters on a SiGe:H and a-SiGe:H:F film characteristics and quality. Literature data show the relationship between germanium content, hydrogen content, deposition method (various glow discharges and CVD), feedgas lmixture, and other parameters and properties, such as optical band gap, dark and photoconductivities, photosensitivity, activation energy, Urbach parameter, and spin density. Some of these are convenient quality indicators; another is the absence of microstructure. Examining RF glow discharge with both a diode and triode geometry, DC proximity glow discharge, microwave glow discharge, and photo-CVD, using gas mixtures such as hydrogen-diluted and undiluted mixtures of silane/germane, disilane/germane, silane/germaniumtetrafluoride, and others, it was observed that hydrogen dilution (or inert gas dilution) is essential in achieving high photosensitivity in silicon-germanium alloys (in contradistinction to amorphous hydrogenated silicon). Hydrogen dilution results in a higher photosensitivity than do undiluted gas mixtures. 81 refs., 42 figs., 7 tabs.

• Research Organization: Solar Energy Research Inst., Golden, CO (USA)
• DOE Contract Number: AC02-83CH10093
• OSTI ID: 5323397
• Report Number(s): SERI/TR-211-3317; ON: DE88001147
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
ALLOYS
AMORPHOUS STATE
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC DISCHARGES
EQUIPMENT
FILMS
GERMANIUM ALLOYS
GERMANIUM BASE ALLOYS
GLOW DISCHARGES
MICROSTRUCTURE
PHOTOELECTRIC CELLS
PHOTOSENSITIVITY
PHOTOVOLTAIC CELLS
SENSITIVITY
SILICON ALLOYS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
THIN FILMS