Focused ion beam processes for high-T/sub c/ superconductors

Journal Article · Sun May 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.584319· OSTI ID:5304837

Matsui, S; Ochiai, Y; Kojima, Y; Tsuge, H; Takado, N; Asakawa, K; Matsutera, H; Fujita, J; Yoshitake, T; Kubo, Y; others, and

Focused ion beam (FIB) processes have been developed for Y--Ba--Cu--O superconductor films. A Y--Cu liquid metal ion source has been fabricated, using a Y/sub 67/ --Cu/sub 33/ eutectic alloy as the ion source. As-sputtered Y--Ba--Cu--O film etch rate ratios to GaAs(100) and Si(100) substrates are 0.28 and 1.4 for 130-keV Au/sup +/ FIB ion etching, respectively. Y--Ba--Cu--O submicron patterns have been demonstrated by using FIB lithography and Cl/sub 2/ reactive ion beam etching. Moreover, a Y--Ba--Cu--O superconducting line with 4-..mu..m linewidth has been fabricated by annealing an as-sputtered Y--Ba--Cu--O line pattern. T/sub c/ control of Y--Ba--Cu--O film has been achieved by 200-keV Ne/sup +/, using conventional ion implantation and 300 keV Si/sup + +/ FIB ion implantation.

• Research Organization: NEC Corporation, Miyazaki, Kawasaki 213, Japan
• OSTI ID: 5304837
• Journal Information: J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 6:3; ISSN JVTBD
• Country of Publication: United States
• Language: English

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71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALKALINE EARTH METAL COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
BARIUM COMPOUNDS
BARIUM OXIDES
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CHLORINE
COPPER COMPOUNDS
COPPER OXIDES
DATA
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
ENERGY RANGE
EQUIPMENT
ETCHING
EXPERIMENTAL DATA
FABRICATION
FILMS
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
HALOGENS
INFORMATION
ION BEAMS
ION IMPLANTATION
ION SOURCES
IONS
KEV RANGE
KEV RANGE 100-1000
MAGNETRONS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NEON IONS
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SEMIMETALS
SILICON
SILICON IONS
SPUTTERING
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES