The role of hydrogen and iron in silicon nitridation by ball milling
- Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, Institute of Advanced Studies, The Australian National University, Canberra, ACT 0200 (Australia)
- Department of Materials Engineering, University of Wollongong, NSW 2522 (Australia)
We have studied in detail the {alpha}-Si{sub 3}N{sub 4} formation during ball milling of Si in NH{sub 3} and N{sub 2} environments and subsequent annealing. {alpha}-Si{sub 3}N{sub 4} can be formed upon annealing after Si is milled in NH{sub 3}, but no such phase is found for milling in N{sub 2}. This difference is attributed to the role of H in embrittlement of the powder particles and to the subsequent introduction of Fe contamination into the Si powder. Our studies also show that the presence of Fe greatly enhances the nitridation reaction of as-milled Si powder. Fe silicide phases can be found after milling in NH{sub 3} and annealing, and the extent of silicide depends on the N content in the powder. In favorable cases, Fe can be removed from the {alpha}-Si{sub 3}N{sub 4} powder by an acid leach. {copyright} {ital 1997 American Institute of Physics.}
- OSTI ID:
- 530024
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 12 Vol. 81; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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