kHz repetition rate operation of excimer laser
Conference
·
OSTI ID:529668
- Kyung Hee Univ., Yongin (Korea, Republic of)
The authors have developed an excimer laser of compact coaxial type in which the one line cross flow fan is used. At 1 kHz repetitive operation, the average power of KrF laser is 56 watt. In this paper, the design parameter and CR characteristics are investigated for the attainment of the 1 kHz excimer laser. They have obtained the overall efficiency of 1.2% with KrF laser gas. At this time, CR and the variation of laser output at 2.97, {+-}9%, respectively. Laser gas volume and active volume are 10 liter, 1.8(H)x1.2(W)x30(L)=64.8, respectively.
- OSTI ID:
- 529668
- Report Number(s):
- CONF-9611124--; ISBN 0-8194-2290-8
- Country of Publication:
- United States
- Language:
- English
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