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U.S. Department of Energy
Office of Scientific and Technical Information

Amorphous silicon solar cells and a method of producing the same

Patent ·
OSTI ID:5282394

Solar cells having a semiconductor body composed of amorphous silicon which is deposited on a substrate coated with aluminum at least on one of its surfaces, with a diffusion barrier layer composed of titanium nitride positioned between the aluminum layer and the semiconductor body. The aluminum layer and the titanium nitride layer can be produced by high frequency sputtering while the semiconductor body can be produced by a glow discharge deposition.

Assignee:
Siemens Aktiengesellschaft (Germany, Federal Republic Of)
Patent Number(s):
US 4511756
OSTI ID:
5282394
Country of Publication:
United States
Language:
English