Review of 1064-nm damage tests of electron-beam deposited Ta/sub 2/O/sub 5//SiO/sub 2/ antireflection coatings
Conference
·
OSTI ID:5264754
Damage tests of Ta/sub 2/O/sub 5//SiO/sub 2/ antireflection films deposited under a variety of conditions showed that thresholds of films deposited at 175/sup 0/C were greater than thresholds of films deposited at either 250/sup 0/C or 325/sup 0/C. Deposition at high rate and low oxygen pressure produced highly absorptive films with low thresholds. Thresholds did not correlate with film reflectivity or net stress in the films, and correlated with film absorption only when the film absorption was greater than 10/sup 4/ ppM. Baking the films for four hours at 400/sup 0/C reduced film absorption, altered net film stress, and produced an increase in the average damage threshold.
- Research Organization:
- Lawrence Livermore National Lab., CA (USA); Optical Coating Lab., Inc., Santa Rosa, CA (USA)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 5264754
- Report Number(s):
- UCRL-86691; CONF-811117-6; ON: DE82010405
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360206* -- Ceramics
Cermets
& Refractories-- Radiation Effects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700208 -- Fusion Power Plant Technology-- Inertial Confinement Technology
ANTIREFLECTION COATINGS
BEAMS
CHALCOGENIDES
COATINGS
ELECTROMAGNETIC RADIATION
ELECTRON BEAMS
LASER RADIATION
LEPTON BEAMS
MEDIUM TEMPERATURE
OPTICAL SYSTEMS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RADIATIONS
SILICON COMPOUNDS
SILICON OXIDES
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS
360206* -- Ceramics
Cermets
& Refractories-- Radiation Effects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700208 -- Fusion Power Plant Technology-- Inertial Confinement Technology
ANTIREFLECTION COATINGS
BEAMS
CHALCOGENIDES
COATINGS
ELECTROMAGNETIC RADIATION
ELECTRON BEAMS
LASER RADIATION
LEPTON BEAMS
MEDIUM TEMPERATURE
OPTICAL SYSTEMS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
RADIATIONS
SILICON COMPOUNDS
SILICON OXIDES
TANTALUM COMPOUNDS
TANTALUM OXIDES
TRANSITION ELEMENT COMPOUNDS