All solid-state magnetic switching exciter for pumping excimer lasers

Journal Article · Thu Oct 31 23:00:00 EST 1985 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1138410· OSTI ID:5260918

Shimada, T; Obara, M; Noguchi, A

A thyristor, silicon controlled rectifier (SCR), switched multistage magnetic pulse compressor has been successfully developed for KrF excimer laser excitation. Being composed entirely of solid-state elements, this exciter will provide the extremely long lifetime at high repetition rate operation that cannot be realized by a conventional power supply with a discharge switch.

• Research Organization: Department of Electrical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223, Japan
• OSTI ID: 5260918
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 56:11; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DESIGN
ELECTRICAL EQUIPMENT
ELECTRONIC EQUIPMENT
EQUIPMENT
EXCIMER LASERS
FABRICATION
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LIFETIME
MAGNETIC FIELDS
OPERATION
POWER SUPPLIES
PUMPING
RARE GAS COMPOUNDS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR SWITCHES
SWITCHES
THYRISTORS