Gas discharges for the excitation of excimer lasers (in German)
Book
·
OSTI ID:6785775
Theoretical and experimental results are presented on excitation conditions and optical inhomogeneities in high-pressure gas discharges in excimer laser systems. Optimal operating conditions are determined for the examples of XeF and KrF lasers. Optimal gas density, electron density, and electron energy in the gas discharge are calculated. Homogeneity and stability conditions for the gas discharge are discussed, and consideration is given to various preionization techniques. Experimental results are compared with the available literature.
- OSTI ID:
- 6785775
- Country of Publication:
- United States
- Language:
- German
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
DATA
ELECTRON DENSITY
ENERGY
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HIGH PRESSURE
INFORMATION
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
NUMERICAL DATA
OPTICAL PUMPING
PUMPING
RARE GAS COMPOUNDS
THEORETICAL DATA
XENON COMPOUNDS
XENON FLUORIDES
420300* -- Engineering-- Lasers-- (-1989)
DATA
ELECTRON DENSITY
ENERGY
EXPERIMENTAL DATA
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
HIGH PRESSURE
INFORMATION
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
NUMERICAL DATA
OPTICAL PUMPING
PUMPING
RARE GAS COMPOUNDS
THEORETICAL DATA
XENON COMPOUNDS
XENON FLUORIDES